Micro Electro Mechanical Systems (MEMS)

Micro Electro Mechanical Systems (MEMS) is a manufacturing technology for microscale devices such as sensors, actuators, transducers, gears, switches, pumps, etc.

Basically, MEMS are microscopic integrated devices made up of electronics, electrical, and mechanical parts that work together to fulfil a single functional need, based on a technique known as Microsystems Technology (MST).

These MEMS-based devices are typically only a few micrometers in size (between 1 to 100 micrometers).

MEMS Sensors

One of the most essential components of today’s digital world is sensors. Because all computing and processing is done using digital signals, there has to be a bridge between the analog and digital worlds. Sensors bridge this gap by observing the temporal impacts of analog physical factors and producing a piece of useful information (to the computer).

A Sensor is a device that includes fundamental sensing elements that sense a physical property such as temperature or humidity and transform it into an electrical signal. A signal processing device, such as an amplifier, filter, or ADC, or a combination of these elements, is also included in a sensor.

When it comes to MEMS Sensors, a Micromachined Microsensor, or simply a MEMS Sensor, is one that is designed and manufactured utilising MEMS Technology.

Types of MEMS Sensors

The automobile sector is a major user of MEMS technology. Modern automobiles include a variety of sensors, the most of which are MEMS-based. Some of them are:

• IMU or Inertial Measurement Units (they are a combination of MEMS Accelerometer and MEMS Gyroscope) are used to measure pitch, yaw, and roll for autonomous driving.
• Accelerometers used for  airbag deployment and electronic stability control.
• We use pressure and inertial sensor for braking control.
• Magnetometer are used for the navigational direction.
• By using airflow sensor, air intake is being monitored.
• Pressure sensor are used in system for monitoring tyre pressure.
• Impact and crash sensor are used for airbag deployment and detection of impact.
• We use fuel sensor for indicator of fuel level.
• Temperature sensor are used for automatic climate control and monitoring of engine temperature.
• MEMS Microphone are used for noise cancellation and communication.

Applications of MEMS

Different sensors, such as pressure, temperature, vibration, and chemical sensors, are made using MEMS technology.

MEMS Sensors like accelerometers, gyroscopes, and e-compass are popular in ships, vehicles, planes, helicopters, and drones.

Sensors, actuators, generators, energy sources, biochemical and medicinal systems, and oscillators all use MEMS. MEMS applications include the following:

• MEMS accelerometers, MEMS pressure sensors, MEMS pressure sensors, MEMS gyroscopes, MEMS, tilt and other types of MEMS resonant sensors are examples of sensors.
• MEMS switches, micro-grippers, micro-levers, and micro-pumps, are examples of actuators.
• MEMS fuels cells, MEMS vibration energy harvesters, and MEMS radioisotope power generators are examples of generators and energy sources.
• MEMS biosensors, MEMS air microfluidic and particle sensors,  lab-on-chips,  are examples of biochemical and biomedical systems.
• MEMS oscillators are used in applications that need precise timekeeping and frequency control.

One of the breakthrough innovations is the idea of combining sensors, actuators, electrical (and electronic), and mechanical components on a single chip. MEMS technology will enable the creation of smart devices having Microsensor perception, Microactuator control, and Microelectronics computational capabilities.